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Plasma Quest Ltd trial next generation Plasma Launch System (PLS)

Plasma Quest Ltd have significantly redesigned their Plasma Launch System (PLS) for use in sputter deposition production environments.

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Zinc Oxide and Hafnium Oxide in TFT’s

This brief summary generated by Cambridge University’s Electrical Engineering Division, describes some of the results obtained to date from their work using PQL’s HiTUS sputter deposition technology. XRD characterisation performed on the films indicates that the HfO is wholly amorphous. Further activities are planned, and subject to confidentiality agreements, additional reports will be presented.

 
     
  ZnO and HfO2 thin films have been deposited at ambient temperature using Plasma Quest Limited’s Hi Target Utilisation Sputtering (HiTUS) technology.  
     
  Indium Tin Oxide (ITO) has been deposited onto glass and flexible substrates at ambient temperatures using PQL's 'High Target Utilisation Sputtering' (HiTUS) technology.  
     
  Advancements in Plasma Quest's High Target Utilisation Sputter (HiTUS) deposition process produces high uniformity thin films.  
     
 

Second PQL success in DTi’s Technology Programme PQL in collaboration with Nottingham Trent University (NTU), has again been successful in its application for a project supported under the DTi’s “Technology Programme”.

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Ground Breaking  Flexible Solar Cell  Research Programme Begins

Plasma Quest Limited (PQL) in partnership with the University of Southampton Civil Engineering Department and Romag has won valuable Dti funding for a two year programme to develop flexible silicon solar cells.

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PQL Go to Moscow

PQL recently exhibited at SEMI Expo CIS2006 in Moscow –

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Flexible Gold!

PQL’s HiTUS technology has been successfully used to deposit Gold thin films (200nm) onto flexible PET and Kapton® sheet with no signs of delamination.

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Plasma Quest presence at SVC conference for second year!

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Plasma Quest Ltd present a talk for the UK Data Storage Network.

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Plasma Quest awarded prize at AIMCAL
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Linear Target
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Plasma Quest working on leading edge technology plasma projects

Plasma Quest Ltd (PQL) is a problem solving research-based company whose core business is thin film deposition sputtering research, and systems development.

PQL engages in all stages of Customers’ thin film materials requirements, from bespoke sputtering trials through to complete thin film process development and production trials.

PQL has developed a high-density plasma method of thin film sputtering that provides process and thin film deposition benefits not currently available from conventional systems - the patented technology, “High Density Plasma forming device” is operationally referred to as High Target Utilisation Sputtering

 (HiTUS).

HiTUS delivers significant increased process scope to operate outside of the conventional sputter deposition “process space”, thereby providing an enabling technology for new applications.

The HiTUS sputtering technology has demonstrated benefits in sectors such as:

The key to PQL’s leading edge thin film deposition coating technology is a remotely generated high intensity plasma that provides a number of important benefits that are unavailable from magnetron, ion beam, thermal evaporation and chemical vapour deposition coating systems.  Additionally PQL’s thin film sputtering technology has delivered superior differentiated coating characteristics for the photonic, semiconductor, and photovoltaic sectors.

With a growing portfolio of products PQL’s HiTUS technology is available in a series of formats, each tailored to meet Customer requirements.  As such PQL works closely with system manufacturers to provide:

  • Complete thin film sputter deposition systems -  S400

  • Remote Plasma Launch Systems -  PLS

as well as providing the technology under licence.

Headed by Professor Michael Thwaites PQL is contracted by a number of prestigious multinational blue chip corporations and academic institutions to develop new processes, deposit materials to exacting requirements and develop deposition equipment to meet a specific need.

PQL’s team of scientists and engineers are regular presenters at commercial, academic and government sponsored seminars.