Systems

We work with system builders to provide our clients with custom built process solutions for R&D and industrial applications.

An example of these are:

S500 Thin Film Sputter Deposition Systems

For substrates up to 5″ diameter.

ILH550 Thin Film In Line System

Commercial system design for substrates up to 16″ square.

Plasma Source (PLS)

For integration or retro-fit with client’s vacuum deposition system.