Sputter Systems
We design and build sputter systems to provide our clients with custom built process solutions for R&D and industrial applications.
An example of these are:
R&D S500 Thin Film Sputter Deposition Systems
For substrates up to 8″ diameter.
Large Area HiTUS In-line system (ILH550)
Commercial system design for substrates up to 16″ square.
Plasma Source (PLS)
For integration or retro-fit with client’s vacuum deposition system.
Large Area HiTUS In-Line system (z600)
Commercial system design for batch coating.
LamCo – Laminar Co-sputter HiTUS
Enabling the standard HiTUS to coat larger areas or to enable co-sputtering
