Sputter Systems

We design and build sputter systems to provide our clients with custom built process solutions for R&D and industrial applications.

An example of these are:


R&D S500 Thin Film Sputter Deposition Systems

For substrates up to 8″ diameter.


Large Area HiTUS In-line system (ILH550)

Commercial system design for substrates up to 16″ square.

Plasma Source (PLS)

Plasma Source (PLS)

For integration or retro-fit with client’s vacuum deposition system.


Large Area HiTUS In-Line system (z600)

Commercial system design for batch coating.

Plasma Source (PLS)

LamCo – Laminar Co-sputter HiTUS

Enabling the standard HiTUS to coat larger areas or to enable co-sputtering