Sputter Systems

We design and build sputter systems to provide our clients with custom built process solutions for R&D and industrial applications.

An example of these are:


R&D S500 Thin Film Sputter Deposition Systems

For substrates up to 8″ diameter.


Large Area ILH550 Thin Film In Line System

Commercial system design for substrates up to 16″ square.

Plasma Source (PLS)

Plasma Source (PLS)

For integration or retro-fit with client’s vacuum deposition system.