Materials

See below for our extensive list of materials that PQL have successfully deposited:

Deposited
Deposited using ceramic target
Process gases

Metals

Ag

Al

Au

Bi

Co

Cr

Cu

Fe

Ga

Hf

Mg

Mn

Mo

Nb

Ni

Pb

Pt

Sn

Ta

Ti

Y

W

Zn

Zr

Dieletrics

Al203

AIN

Cu0

Hf02

Mg0

Nb205

Pb0

Si02

Ta205

Ti02

TiN

Tix0y

(Oxy-Nitrides and sub-oxides are also possible with PQL technology)

Transparent conducting oxides

Al:ZnO (AZO)

In:ZnO (IZO)

Sn:InO (ITO)

ZnO

Magnetic materials

Co

CoFe

Fe

NiFe

Polymers

C2F4

Sputter Gases

Ar

Kr

Reactive Gases

O2

N2

H2

CH4

H2S