Plasma Source (PLS)

PQL’s sidearm technology can be purchased for integration or retro-fit with client’s vacuum deposition system. Contact PQL to learn how integrating our technology with your existing sputtering deposition system will improve processes such as metal and dielectric sputtering; reactive sputter coating; Plasma etch; PECVD.

The Plasma Source is available with 100mm and 150mm diameter plasma tube.