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S400
Thin Film Sputter Deposition Systems
 PQL’s
HiTUS Technology is available as either complete coating systems
or modules for cost effective upgrade of existing sputter systems
PQL’s
High Target Utilisation Sputtering (HiTUS) technology facilitates
quality thin film coatings not achieved from conventional deposition
systems. Commerce and academia use HiTUS because of the inherent
advantages of using externally generated plasma to deposit materials.
Many of the known deficiencies of Magnetron, Ion Beam and Chemical
Vapour Deposition systems are overcome by HiTUS, for example, HiTUS
accommodates thick ferro magnetic material, full target erosion
is achieved therefore improving productivity and material wastage,
coating onto organic substrates is as effective as non organic materials.
HiTUS delivers exceptional film properties while facilitating very
low and high deposition rates. HiTUS is becoming recognised
globally as sputtering technology that is redefining what can be
attained in the thin film arena.
S400
sputter systems also feature:-
- Fully automated
control
- Individually
designed and manufactured to meet customer requirements and budgets
- selectively
sputter from any one of up to eight materials when combined with
PQL’s Multiple Target Holder
- Large area
and multiple substrate capability
 Sidearm
Plasma Launch Systems (PLS)
PQL’s
sidearm technology can be purchased as a straightforward and cost
effective upgrade to existing thin film deposition systems to reap the benefits of deploying
PQL’s Hi Target Utilisation Sputtering (HiTUS) technology.
Contact PQL to learn how integrating HiTUS with your existing sputtering
deposition system will improve processes such as metal and dielectric
sputtering; reactive sputter coating; Plasma etch; PECVD.
The HiTUS Plasma
Launch System is available with 100mm and 150mm plasma launch tube.
 Multiple
Target Holder
The combination
of PQL’s Sidearm Plasma Launch System and Multiple Target
Holder provides the capability to selectively sputter thin films from any one
of up to eight materials repeatedly and reliably. With the advantage
of only requiring one bias power supply this is an ideal tool for
both R&D establishments and for the production of multi layer
thin film coatings.
As with the Sidearm Plasma Launch System, PQL’s Multiple Target
Holder is readily integrated into existing vacuum systems.
Contract
R&D and Process Development
PQL’s
contract R&D activity has built wide-ranging experience, in thin film materials, within
the team of PQL scientists and engineers; this in-depth experience
is an accessible and valuable resource. Both commerce and academia
engage PQL from a range of industry sectors covering Precision Optics,
Photonics, Semiconductors, Magnetics and Photovoltaics. PQL conducts
bespoke material trials to full thin film process development and production trials.
PQL’s in-house facilities include sputter deposition systems
(3 with "HiTUS" Plasma launch systems) and analytical facilities including
SEM and spectrophotometer. The equipment will accommodate large
(500mm dia) substrates.
PQL can be contracted
to undertake design services, material trials and under confidentiality agreement
be engaged with a client to do thin film material process development. Access to PQL’s
thin film deposition expertise can improve time to market and reduce
internal costs while minimising risk by effectively extending the
capability of your own R&D resource.
Contact PQL
to discuss your trial requirements, to obtain costing and turn around
times.
Added
Value Consultancy
PQL’s
team of scientists and engineers has proven experience in most fields
of vacuum and thin film deposition technology. PQL is constantly working with
and for academia and commerce focused on best of breed coating solutions.
Engaging PQL with a consulting assignment gives your company access
to a wealth of expertise headed by Professor Mike Thwaites who has
been acknowledged formally by the UK Department of Trade and Industry
for his contribution to materials science.
Plasma Quest
Limited (PQL) is a research-based company whose core business is
the development, application and commercialisation of high-density
plasma to facilitate quality thin film deposition coatings not available
from conventional coating systems. PQL’s clearly defined area
of expertise has created PQL competence that is available to commerce
and academia for thin film deposition related activities.
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