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Hafnia (HfO2)

 

PQL's Hafnia films have recently been used to form the gate inslating layer for thin film transistors (TFT).

  • High dielectric constants (k=23 for HfO2) suitable for high performance devices. Breakdown >10MVcm-1
  • Resistivity2.5x1013Ω.cm
  • Opital transmission of full TFT device >90%.
  • Low temperature process