Barrier Layers

Plasma Quest Ltd (PQL) have developed a process for stable, uniform, high rate deposition of good quality low temperature alumina (Al203) films. Our technology can be used to develop barrier layers suitable for use in OLED devices.

  • Low temperature process (deposition onto flexible)
  • Deposition rate up to 100nm/min.
  • No need for pulsed DC or feedback control (automatic or manual) of the oxygen gas flow.
  • Excellent thickness and optical uniformity (<1% variation across a 6″ dia. substrate).
  • Intrinsically low stress, to permit reliable step coverage.

Interested?

If you would like to discuss your trial requirements, obtain costing, turnaround times, or for any other questions, we would love to hear from you.