Coating by wet processes such as electroplating is becoming increasingly less acceptable. PQL’s sputter deposition technology offers an attractive alternative, with commercial benefits having already been demonstrated.
- Film densities are substantially higher than can be achieved through wet processing
- Adhesion is significantly greater
- The required thicknesses of the deposited films can be lower
- The number of process operations such as post-deposition annealing is reduced, leading to higher yields
As an example, chromium and gold films sputtered onto molybdenum discs out-performed electroplated devices, and were significantly better than films deposited from conventional PVD systems.